Dullweber, Thorsten; Hesse, Rene; Bhosle, Vikram; Dubé, Chris
(London : Elsevier Ltd., 2013)
Ion implantation is an attractive candidate for PERC solar cells due to the single-sided emitter phosphorus doping. The oxide, which is formed during the implant anneal, can be used as rear passivation of PERC cells. ...